Proceedings of the First International Conference on Combinatorial and Optimization, ICCAP 2021, December 7-8 2021, Chennai, India

Research Article

Magnetic, Surface And Elemental Characterization of FECO (50:50, 70:30) 50nm Thin Film Grown By Ultra High Vacuum DC Magnetron Sputtering on Silicon (001) Substrate

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  • @INPROCEEDINGS{10.4108/eai.7-12-2021.2314739,
        author={Mani  GMK and Dhanalakshmi  D},
        title={Magnetic, Surface And Elemental Characterization of FECO (50:50, 70:30) 50nm Thin Film Grown By Ultra High Vacuum DC Magnetron Sputtering on Silicon (001) Substrate},
        proceedings={Proceedings of the First International Conference on Combinatorial and Optimization, ICCAP 2021, December 7-8 2021, Chennai, India},
        publisher={EAI},
        proceedings_a={ICCAP},
        year={2021},
        month={12},
        keywords={magnetic thin film feco vsm spin polarization},
        doi={10.4108/eai.7-12-2021.2314739}
    }
    
  • Mani GMK
    Dhanalakshmi D
    Year: 2021
    Magnetic, Surface And Elemental Characterization of FECO (50:50, 70:30) 50nm Thin Film Grown By Ultra High Vacuum DC Magnetron Sputtering on Silicon (001) Substrate
    ICCAP
    EAI
    DOI: 10.4108/eai.7-12-2021.2314739
Mani GMK1,*, Dhanalakshmi D1
  • 1: PSG College of Technology
*Contact email: manigmk7396@gmail.com

Abstract

Fe50Co50 and Fe70Co30(50nm) thin films prepared onto the Silicon (001) substrate at room temperature using UHV DC Magnetron Sputtering (PVD) system. We prepared FeCofilms and characterized their Magnetic, Topographic, Morphology and Elemental analysis using VSM, AFM, FESEM, and EDAX technique respectively. VSM result confirmed both materials are good magnetic in nature and both their Coercivity nearly 200Oe but Fe50Co50has higher magnetization when compared to Fe70Co30 film. From AFM results, the average roughness and root mean Square ofFe50Co50 film value are double the times higher than Fe70Co30film. From FESEM result Morphology of the Fe50Co50film like a columnar structure and Fe70Co30 as like columnar agglomeration structure. EDAX result revels high number of oxygen content present in Fe70Co30 film than Fe50Co50 film as well as no other impurities present in the film.