Research Article
A New Parallel XY Nanopositioning Platform Design
@INPROCEEDINGS{10.4108/eai.17-1-2025.2355236, author={Zhengyu Qi}, title={A New Parallel XY Nanopositioning Platform Design}, proceedings={Proceedings of the 4th International Conference on Computing Innovation and Applied Physics, CONF-CIAP 2025, 17-23 January 2025, Eskişehir, Turkey}, publisher={EAI}, proceedings_a={CONF-CIAP}, year={2025}, month={4}, keywords={planar motion stage parallel robots precision fabrication}, doi={10.4108/eai.17-1-2025.2355236} }- Zhengyu Qi
Year: 2025
A New Parallel XY Nanopositioning Platform Design
CONF-CIAP
EAI
DOI: 10.4108/eai.17-1-2025.2355236
Abstract
With the development of high-performance linear platforms for producing computer hard disk drive read/write heads and medical devices, nanopositioning systems are becoming increasingly important and have great application prospects in fields such as laser mirror positioning and high-resolution spectrometers. The current nanopositioning systems have a restricted single-axis travel range because of their physical design and the integration process involved. By utilizing established flexible mechanisms in the workplace, a novel large-range nanopositioning system was developed through SolidWorks modeling, with its accuracy confirmed via ANSYS simulation. This design aims to enhance the practical use of large-range nanopositioning systems.
